Parylene films open new applications when used as a free standing membrane while keeping its outstanding properties.
Parylene is a polymer material which is biocompatible, hydrophobic, and resistant to the vast majority of organic solvents, strong acids and bases. It is elaborated without solvent from an original process known as Vapor Polymerization Deposition. Due to its strong penetration ability (ideal for complex 3D shapes) and its excellent barrier properties, Parylene coatings have been extensively used as an encapsulation material in various industries (electronic, medical, sensors, MEMS, etc). More recently, the use of free standing Parylene films opens new possibilities to further make use of these exceptional properties.
With an increasing demand for implantable devices, the medical industry presents a huge potential to make use of free standing Parylene. Indeed, Parylene films become more and more essential to the manufacturing of smart flexible devices (implantable electrodes, smart patches, etc…) able to adapt to movements of the human body. In this context, Comelec promoted this technology in the frame of the European project “Informed”. Combined with other materials and structuring technologies, applications are infinite.
The use of Parylene free standing films as membranes with tunable properties also represents an important source of applications, for example in the fields of gas detection or fluid filtration.
Comelec has developed a manufacturing process to produce these films in large quantities and with high thickness uniformity. The main commercial Parylene grades are already available as free standing films with thicknesses in the range 5 – 50 µm (others on request).
Depending on the customer, the Parylene films may be provided free standing or on silicon wafers (up to 200mm) for further post-processing (easily removable from silicon substrate by delamination or resist dissolving).