EQUIPMENT MANUFACTURING

Multilayer cutting edge technology integrated in a single hybrid equipment, available for new thin films development and production purpose.

Multilayer Hybrid Equipment

Comelec designs and manufactures innovative hybrid equipment integrating unique multilayer coating technologies.

While benefiting from the latest innovations of conventional Parylene technologies, Comelec hybrid plateforms additionally integrate dedicated independent gas panels, pumping lines and unique features to efficiently combine Parylene and inorganic materials deposition processes.

The hybrid approach together with a fully modular and independent design enables unlimited possibilities in terms of coating stack and process control.

While conventional methods to combine coatings from separate equipment are limited due to obvious productivity and quality concerns, Comelec hybrid deposition chambers open new paths towards cost efficient industrial integration of advanced coatings stacks.

This CE certified pioneering equipments are built with high-quality components and are controlled using advanced recipe-based automation system to ensure process reproducibility and production traceability.

Comelec - multilayers coatings

Two platforms are commercially available:

Comelec c30h

Overall dimensions (L x W x H)2250 x 1160 x 1450mm
Weight350 kg
Chamber size∅ 295 x 370 mm
Tooling size∅ 260 x 320 mm
Max. tooling load100kg
Dimer load capacity150g
Pumping capacity40 m3/h
Power supply required3 x 400V + N + PE – 50 Hz
3 x 25A – 15kW
Thermalized chamberTemperature range: 20 – 80°C
Power supply: 3 x 400V + PE – 50Hz
3x 14A – 9kW
Remote Plasma
Source
Frequency: 1.7 – 3MHz
Power: 3000W
In Situ RF
capacitive
Plasma Source
Standard
processable
materials
Parylene: C, D, N, F-VT4, F-AF4
ALD: Al 2 O 3 , TiO
Process
temperature
Parylene: room temperature
ALD: 60 – 80°C

Overall dimensions (L x W x H)2250 x 1160 x 1450 mm
Weight350 kg
Chamber size∅ 295 x 370 mm
Tooling size∅ 260 x 320 mm
Max. tooling load100kg
Dimer load capacity150g
Pumping capacity40 m3/h
Power supply required3 x 400V + N + PE – 50 Hz
3 x 25A – 15kW
Thermalized chamberTemperature range: 20 – 80°C
Power supply: 3 x 400V + PE – 50Hz
3x 14A – 9kW
Remote Plasma
Source
Frequency: 1.7 – 3MHz
Power: 3000W
In Situ RF
capacitive
Plasma Source
Frequency: 13.56MHz
Power: 300-1000W
Standard
processable
materials
Parylene: C, D, N, F-VT4, F-AF4
PECVD: SiO 2
Process
temperature
Parylene: room temperature
PECVD: 20 – 80°C

Comelec goes beyond simply manufacturing equipment but provides turnkey and customized solutions. From customer application, concept, process optimization, installation and custom start-up of the machines at production site, as well as after-sales services, we support customers all along the machine lifetime.